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當前位置：首頁   >  產(chǎn)品中心  >    >    >  臺式光刻機_百科_江蘇雷博供應杭州/上海等地

臺式光刻機_百科_江蘇雷博供應杭州/上海等地

簡要描述：臺式光刻機參數(shù)：1.最大曝光面積:160mm*160mm。⒉.曝光分辨率:1um(膠厚≤0.5um的正膠)。3.對準精度:±1um(標準晶圓拋光片)。4.光源強度:35mW/cm2。5.曝光波長:LED光源(進口燈珠，壽命>1萬小時)

  • 所在城市：無錫市
  • 廠商性質：生產(chǎn)廠家
  • 更新日期：2025-08-11
  • 訪  問  量：2315

詳細介紹

　　臺式光刻機參數(shù)：
 
　　1.最大曝光面積:160mm*160mm
 
　?、?曝光分辨率:1u m(膠厚≤0.5um的正膠)
 
　　3.對準精度:± 1um(標準晶圓拋光片)
 
　　4.光源強度:35mW/cm2
 
　　5.曝光波長:LED光源(進口燈珠，壽命>1萬小時)
 
　　6.曝光方式:定時(倒計時方式)
 
　　7.掩模樣片相對運動范圍:X:優(yōu)于±5mm;
 
　　8.Y:優(yōu)于±5mm;0:優(yōu)于±6°
 
　　9.掩模尺寸:7英寸，樣片規(guī)格:6英寸(晶圓片)
 
　　10.數(shù)字設定對準間隙和曝光間隙
 
　　11.掩模樣片分離間隙:6 =O-500um連續(xù)可調
 
　　12.對準方式:自動對準，可根據(jù)客戶需求，增加對準標記的類型，累計不超過4組
 
　　13.自動輸片:機械手自動輸片(專用樣片機械手臂及片叉)，含預對準定位功能
 
　　14.顯微掃描范圍:Y:± 40mm(數(shù)字設定)
 
　　15.具備正壓氣浮曝光、硬接觸曝光、壓力接觸曝光，以及接近式曝光四種功能CCD+遠心鏡頭+顯示器對準，光學合像
 
　　16.調平接觸壓力通過傳感器保證重復
 
　　17.雙物鏡可調距離范圍:30mm-130mm
 
 

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  • 聯(lián)系人：陸燕
  • 地址：江蘇江陰金山路201號創(chuàng)智產(chǎn)業(yè)園A座五樓南
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